TENCOR SURFSCAN 4500 SURFACE CONTAMINATION ANALYZER
Description:
Measures the Size, Number, and Location of Wafer Particles With Scattering Cross-sections from 0.006 mm2 – 1024 mm2
Manufactured Feb. 1989
S/N 0289-139
Model 092290
2-inch, 3-inch, 100mm, 125mm, and 150mm Wafer Size Capability
Specifications
Particle Sensitivity: 0.2 mm Diameter Latex Spheres on Bare Silicon Substrate
Haze Sensitivity: 0.4 ppm w/ 0.1 ppm Increments
Spatial Resolution: Minimum Spacing of 50 mm Between Particles
Count Accuracy: Better Than 1 % as measured On A VLSI Relative Standard
Repeatability: Particle Counts Repeatable to 1% or Less
Contamination: No More Than 2 Particles With Scattering Cross-Section > 0.5 mm2 Per 50 Passes (97% Confidence)
Scanning Beam: Cycle of 400 Laser Scans Per Second
Light Source: Helium-Neon Laser; 2 mW, Wavelength (l) = 6328 Å
Dimensions: 50 in W x 24 in D x 25 in H
Weight: 412 lbs
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