LAM 4520
Description:
S/N 24232
200mm, CE Marked, Wafer Clamping, Backside Helium
Endpoint Detection, Ergonomic Cassette load/unload
Hine 38A Indexers, Upgraded wafer edge sensor
Orbital welded 8 process gas box with Tylan 2900 MFC's
Remote RF cart with AE PDW 2200
2080 dual channel chiller
Classic software. Pumps and process kit are not included.
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