AMAT CENTURA MXP+
Description:
Manufactured 1996
200 mm Wafer Configuration
Wide Body Load Lock, HP Robot
Software Version B3_6_2C_3_J1A
MxP+ Oxide Etch Chamber:Electrostatic Chuck, Seiko Seiki STP 301CB1 Turbo, Seiko Seiki SCU 21D Turbo Controller, Phase IV Match, ENI Oem 12B-03 RF Generator
Gas Panel Configuration: Aera FC-780C MFC C4F8 10 Sccm, Aera FC-780C MFC N2 50 Sccm, Aera FC-780C MFC O2 20 Sccm, Aera FC-780C MFC CF4 50 Sccm, Aera FC-780C MFC CHF3 100 Sccm, Aera FC-780C Ar 200 Sccm
MxP+ Oxide Etch Chamber: Electrostatic Chuck, Seiko Seiki STP 301CB1 Turbo, Seiko Seiki SCU 21D Turbo Controller, Phase IV Match, ENI Oem 12B-03 RF Generator
Gas Panel Configuration: Aera FC-780C MFC C4F8 10 Sccm, Aera FC-780C MFC N2 50 Sccm, Aera FC-780C MFC O2 20 Sccm, Aera FC-780C MFC CF4 50 Sccm, Aera FC-780C MFC CHF3 100 Sccm, Aera FC-780C Ar 200 Sccm, Aera FC-780C Co
Gas Panel Configuration: Aera FC-780C MFC CHF3 200 Sccm, Aera FC-780C MFC O2 200 Sccm, Aera FC-780C MFC CF4 200 Sccm, Aera FC-780C MFC He 200 Sccm, Aera FC-780C N2 200 Sccm, Aera FC-78C Co 300 Sccm
1 Amat 0 Heat Exchanger
1 Neslab HX-150 Chiller
1 Taitec Ch800B Chiller
Gas Scrubber
Remote Monitor
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